For precision positioning stage the multi-DOF measurement procedure based on machine vision and plane normal grating is, using parallel light to irradiate plane normal grating attached on positioning stage to generate projection, amplifying this projection by object lens, and imaging on CCD, then transmitting the image to computer by frame grabber, processing image to completes five DOF (including motion in XY plane, rotation around Z axis, tilting by Y axis and pitching by X axis) measurement.
基于机器视觉和平面正交光栅的精密定位工作台多自由度测量过程，是利用平行光照射贴于工作台的平面正交光栅产生投影，此投影经显微物镜放大，成像于CCD的光敏感面上，然后通过图像采集卡将图像数据传输到计算机进行相关处理，从而实现精密定位工作台的五自由度（XY平面内的移动、绕Z轴的转动、绕Y轴的倾斜和绕X轴的俯仰运动）测量。
In order to get higher even brightness field in imaging field, grating period should be double grating width and reduce the frame and crab-cantilevers size.
设计时，为了要在像面上得到更高的亮度均匀性，需要满足可动光栅栅条宽度为光栅周期的一半，同时应尽量减少悬臂梁和边框的宽度。
The reasons causing the vibration of bridge frame are explored in principle. Theoretical relationship between dynamic deformation of CMM body and measurement error of CMM is deduced. The influence of dynamic property parameter of gauging head and grating dynamic property parameter on dynamic measuring precision of CMM are researched.
对引起测量机桥架振动的原因进行了原理性研究，推导了测量机机体动变形和测量机测量误差之间的理论关系式，研究了测头系统动态特性、光栅动态特性对测量机动态测量精度的影响。
All surface channel inside E. V. A. shall be covered with " NONROC " heavy duty tee frame transverse bar trench grating or similar approved.
所有的在E.V.A。中的沟渠表面需要覆以“Nonroc”重型（或者说是坚固的）丁字型横梁隔栅或相近的被证实可用的其他结构。
Changing the phase of digital grating can realize Moire fringe scanning. The global center of beam pattern can be calculated by multi_ frame scanning images.
改变该数字光栅的相位，可实现莫尔条纹扫描，用多幅扫描图像可算出光斑图像整体中心。
All surface channel inside E.V.A.shall be covered with " NONROC " heavy duty tee frame transverse bar trench grating or similar approved.
所有的在E.V.A。中的沟渠表面需要覆以“Nonroc”重型（或者说是坚固的）丁字型横梁隔栅或相近的被证实可用的其他结构。