This controller operates automatically according to the batch sequence and stops automatically when the totalized flow reaches batchloader set value.
控制器按批程序自动运行,当计算流量的总数达到批设定值时,自动停止。
The silver metal device on the right side of this Centura machine is a batchloader, used to quickly depressurize a stack of wafers prior to feeding them into the machine for processing.